Recent Development in Photosensitive Polyimide (PSPI)

Application of Photosensitive Polyimide: Mask Saving Process for Buffer Coating

Issues in the LSI polyimide buffer coating process which uses photosensitive polyimide also as a mask of passivation film etching are reviewed. Change of lithography wave length from g-line to i-line causes the difficulty in the polyimide patterning. However, today's improved polymers, both ester type and ionic type, have enough ability to open 10 um windows. Dry etching condition must be adjus...

Photosensitive-polyimide based method for fabricating various neural electrode architectures

An extensive photosensitive-polyimide (PSPI)-based method for designing and fabricating various neural electrode architectures was developed. The method aims to broaden the design flexibility and expand the fabrication capability for neural electrodes to improve the quality of recorded signals and integrate other functions. After characterizing PSPI's properties for micromachining processes, we...

Physico-chemical Insights on Tuning the Morphology of a Photosensitive Polyimide by UV Laser Irradiation

An aromatic photosensitive polyimide is prepared from 3,3',4,4'-benzophenone tetracarboxylic dianhydride and 4,4'-diaminodiphenyl methane and its structuring ability upon UV-laser exposure is investigated. Surface modification is performed at two laser fluences, i.e. 89 and 244 mJ/cm2, and different number of pulses. The changes of the surface morphology, induced by the employed patterning tech...

Recent Development in Control of Threileria annulata in Iran

Development of polyimide flexible tactile sensor skin

We present the development of a polyimide-based two-dimensional tactile sensing array realized using a novel inverted fabrication technique. Thermal silicon oxide or Pyrex R © substrates are treated such that their surfaces are OH group terminated, allowing good adhesion between such substrates and a spun-on polyimide film during processing through what are suspected to be hydrogen bonds that c...